发明名称 |
Perpendicular magnetic film of spinel type iron oxide compound and its manufacturing process |
摘要 |
Disclosed herein is a perpendicular magnetic film of spinel type iron oxide formed on a surface of a base substrate in the form of columnar grains which are densely arranged perpendicularly to the surface of the base substrate. A vapor of an organic iron compound or a mixed vapor consisting of the organic iron compound vapor and a vapor of an organic metal compound different from the organic iron compound is added with oxygen to obtain a mixed gas. The mixed gas is subjected to chemical vapor deposition on the substrate at low temperature, at reduced pressure in plasma, thereby to obtain the perpendicular magnetic film.
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申请公布号 |
US4975324(A) |
申请公布日期 |
1990.12.04 |
申请号 |
US19870110852 |
申请日期 |
1987.10.21 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
TORII, HIDEO;FUJII, EIJI;AOKI, MASAKI;AOKI, NOBUYUKI;OCHIAI, KEIICHI |
分类号 |
C23C16/40;C23C16/507;G11B5/64;G11B5/85 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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