发明名称 |
Process for making a thin molybdenum sulfide film and article |
摘要 |
The process for making a thin Molybdenum sulfide film on a substrate in which the physical properties vary in a wide range and can be adjusted to the desired values comprises depositing on the substrate from a reaction gas mixture in the gas phase. This can be accomplished by decomposing a volatile molybdenum compound together with a volatile sulfur compound as a reactive gas in a glow discharge to form the reaction gas mixture in the presence of the substrate. The molybdenum compound can be molybdenum hexacarbonyl. The sulfur compound can be hydrogen sulfide.
|
申请公布号 |
US4975340(A) |
申请公布日期 |
1990.12.04 |
申请号 |
US19890417875 |
申请日期 |
1989.10.06 |
申请人 |
SCHERING AKTIENGESELLSCHAFT |
发明人 |
SUHR, HARALD;SCHMID, REINER;TRAUS, IRIS |
分类号 |
C01G39/06;B01J27/051;C23C16/30 |
主分类号 |
C01G39/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|