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发明名称
PRODUCTION OF MULTILAYERED THIN FILM
摘要
申请公布号
JPH0372071(A)
申请公布日期
1991.03.27
申请号
JP19890206647
申请日期
1989.08.11
申请人
NIPPON STEEL CORP
发明人
TAKAGI YASUO;IIJIMA ISAO;AKIYAMA NOBUHIRO;YAMADA HIDEO
分类号
C23C14/34;C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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