| 摘要 |
<p>PURPOSE:To enhance the degree of freedom in design, to make film thickness and film quality uniform and to have the advantage of making the area of an element large by forming an insulating film which intervenes between 1st and 2nd conductors of a hard carbon film and forming a conductor provided in contact with an under the insulating film of a zinc oxide transparent electric conductor. CONSTITUTION:The insulating film 3 which intervenes between the 1st and the 2nd conductors 2 and 4 is formed of the hard carbon film, and the conductor 2(lower conductor) provided in contact with and under the insulating film 3 is formed of the zinc oxide transparent electric conductor. In the case of forming the lower conductor 2, it is good to dope ZnO with group III, group IV or halogen element. By thus doing, resistance is lowered. Since the hard carbon film is vapor growth film, various physical properties are controlled by a film producing condition in a wide range. Thus, the design of a device is possible in the wide range and the dispersion of the characteristic of the element is reduced, then the element is made excellent in threshold voltage and withstand voltage.</p> |
