| 摘要 |
PROBLEM TO BE SOLVED: To make this device a device suitable for the manufacturing of the substrate made up of brittle materials by removing a working regenerative layer existing on the surface of the substrate while performing an anode-oxidation process in the same device after the surface of the substrate is mechanically worked. SOLUTION: A lower surface plate 2 is freely rotatably provided on a base 5 and its upper surface becomes a planar surface working part capable of a mechanical surface working. The same kind of a polishing pad as that of the polishing pad mounted on an upper surface plate 3 is mounted on this surface working part. A glass shaped carbon substrate moving integrally with a carrier while lowering the upper surface plate 3 is finishingly polished by being held in between the lower surface plate 5 and the upper surface plate 3. Thereafter, the carbon substrate is subjected to a water system cleaning before the anodization is performed and contaminated materials such as the working degenerative layer which is generated on the surface of the substrate by the finishing polishing dust and organic contamination existing on the surface of the substrate or the like are oxidized and to be removed by the processing. Oxidized materials become gass to be vaporedly dispersed and they never remain on the surface of the substrate. |
