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发明名称
ASHING APPARATUS
摘要
申请公布号
JPH0637009(A)
申请公布日期
1994.02.10
申请号
JP19920186965
申请日期
1992.07.14
申请人
FUJITSU LTD
发明人
SHINAGAWA KEISUKE
分类号
H01L21/30;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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