| 摘要 |
<p>PURPOSE:To provide a substrate store device by which the storable number of a substrate is increased without the enlargement of a floor space occupied by a device and the anxiety for the substrate affected by a dust before processing for temporary storage is reduced. CONSTITUTION:A receiving position 12 for receiving cassettes 40 in which plural substrates W before processing are stored and carried and a loading position 20 for holding cassettes storing plural substrates W before processing and transporting the substrate W to the carrying in part of a substrate processor one by one from this cassette are set upward a pass line 46. On a carrying passage from the receiving position to the loading position 20, the cassettes storing positions 14, 16, 18 for storing temporarily the cassettes for storing plural substrates W before processing are arranged so that this position can be above the pass line and the cassette storing position is set above the receiving position.</p> |
