| 摘要 |
PURPOSE: To obtain an aluminum nitride sintered compact, producible at a low cost by baking within a low temperature range of 1550-1650 deg.C and having a thermal conductivity as ultrahigh as 120-250W/m.K by mixing an aluminum nitride powder with a specific sintering assistant, forming the resultant mixture and baking the formed compact. CONSTITUTION: This aluminum nitride sintered compact is obtained by forming an aluminum nitride powder having <=1wt.% oxygen content together with the following sintering assistant and baking the formed compact. The sintering assistant is a mixture of 5-50mol% calcium fluoride with 95-50mol% yttrium fluoride and the amount thereof blended is 1-2wt.% based on the aluminum nitride powder. |
