发明名称 |
Method of manufacturing a chemically adsorbed film |
摘要 |
<p>This invention aims to form uniformly and effectively an ultra thin chemical adsorbing film having an excellent water repellent property, oil repellent property, and contamination-proof property on the surface of a substrate by chemically adsorbing in a gas phase atmosphere. A chemically adsorbed film can be formed on any type of substrate and in a short time by chemically adsorbing a chlorosilane based surface-active agent on the surface of a substrate having active hydrogen groups. Further, a chemically adsorbed monomolecular film, or a polymer film, can be formed on any type of substrate and in a short time by forming a siloxane based monomolecular film or a polysiloxane adsorbed film in a gas atmosphere having a chlorosilane based surface-active agent having plurality of chlorosilyl groups. <IMAGE></p> |
申请公布号 |
EP0547550(B1) |
申请公布日期 |
1998.03.25 |
申请号 |
EP19920121270 |
申请日期 |
1992.12.14 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
OGAWA, KAZUFUMI;MINO, NORIHISA;SOGA, MAMORU;HIGASHINO, HIDETAKA |
分类号 |
B05D1/18;B05D3/14;B05D7/24;C09D4/00;(IPC1-7):B05D1/18 |
主分类号 |
B05D1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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