发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To enable high speed operation by controlling a height of a potential barrier of a potential barrier layer by means of voltage to be impressed on a re-grown extra-thin gate region and by controlling carrier conduction from an extreme thin source region to an extreme thin drain region. SOLUTION: When a carrier from a source region 2, consisting of a high concentration impurity region, reaches a drain region 5 through a potential barrier 4, high-speed operation is performed since the utmost atomization reaching a drain with no collision with a crystal lattice at a carrier heat speed up to the drain is performed. Since the potential barrier 4 is controlled by an outer gate and source-drain bias voltage, further high speed can be achieved. Since the potential barrier 4 or tunnel probability of a tunnel implantation layer is controlled by outside gate voltage and source-drain bias voltage, further utmost high-speed performance can be exhibited.
申请公布号 JPH1093110(A) 申请公布日期 1998.04.10
申请号 JP19960246526 申请日期 1996.09.18
申请人 SEMICONDUCTOR RES FOUND 发明人 NISHIZAWA JUNICHI;KOYAMA YUTAKA;PIYOOTORU PUOTOKA
分类号 H01L29/06;H01L29/80;(IPC1-7):H01L29/80 主分类号 H01L29/06
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