| 摘要 |
PROBLEM TO BE SOLVED: To carry many semiconductor wafers at the same time with a small weight load, while protecting them from contamination. SOLUTION: A carrier is constituted of a carry track 2 which is made of ultrapure water 3 flowing toward the specified point of carriage, and a carrier jig 1 in which a vacant chamber to house a plurality of semiconductor wafers W and get buoyancy on a level of floating from the bottom of the carry track 2, housing these semiconductor wafers W is made and which is soaked in water. Then, the plural semiconductor wafers W within the carrier jig 1 are carried en block to a carry point, making use of the buoyancy working on the carrier jig 1. |
