| 摘要 |
PROBLEM TO BE SOLVED: To prevent the drop of rigidity of a vacuum carrer robot and suppress the generation of dust. SOLUTION: Moving the first wing 103 connected to a rotational driving mechanism 101 counterclockwise and the second wing 104 connected to a rotational driving mechanism 102 clockwise by the same angle each will make a link mechanism drive a fork 122 downward in the figure. At this time, a first arm 107, a second arm 109, and sub arms 118 and 119 on the fork 122 are restricted for movement because they rotate severally on different axes, so it becomes possible for the fork 122 to go straight without rotating. |
