| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for irradiating an object with an active energy beam and an object to be irradiated with it which have little adverse effect on a working environment and can reduce the degree of an inactivation by an inactive gas. SOLUTION: If the acceleration voltage of an irradiating electron beam is 40kV or lower, the oxygen concentration of a part irradiated with the electron beam is adjusted to that in an approximate air atmosphere or lower and then an object is irradiated with the electron beam. If the acceleration voltage of an irradiating electron beam exceeds 40kV, the oxygen concentration is adjusted to the one shown by Y<=1.19×10<2>×exp(-4.45×10<-2>×X), letting the acceleration voltage (kV) = X and the oxygen concentration (%) in a part irradiated with the electron beam = Y, and then an object is irradiated with the electron beam.
|
