Vorrichtung zum Trocknen von Substraten,申请号DE19971021689-传众专利搜索

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发明名称	Vorrichtung zum Trocknen von Substraten
摘要
申请公布号	DE19721689(C2)	申请公布日期	1999.06.10
申请号	DE19971021689	申请日期	1997.05.23
申请人	STEAG HAMA TECH GMBH MACHINES, 75447 STERNENFELS, DE	发明人	SPEER, ULRICH, 75447 STERNENFELS, DE;WEBER, KLAUS, 75447 STERNENFELS, DE
分类号	F26B3/04;F26B3/28;F26B15/04;G11B7/26;(IPC1-7):F26B3/30	主分类号	F26B3/04
代理机构		代理人
主权项
地址

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