| 摘要 |
PROBLEM TO BE SOLVED: To reduce thickness of a thin film and enhance the efficiency to attain the larger size and make into fine state of a liquid crystal display by alternately laminating a carrier generating layer and a carrier moving layer by the use of a high purity target by means of pulse laser evaporation PLD, and specifying the average roughness of each layer. SOLUTION: Atoms, molecules, or ions are accumulated on a monocrystal substrate, having a surface super-flattened in atomic order by PLD filming method using a sintered body or powder body of high purity In2O2, ZnO or the like as target and a laser beam as starting material evaporating source to alternately laminate a carrier generating layer and a carrier moving layer thereon in atomic layer development mode. At this time, vacuum level, power density of laser beam, temperature of substrate and oxygen partial pressure are properly regulated to set the film thickness to 2-30 mm, and the surface roughness in the interface between the respective layers to 10 nm or less by square average square root roughness Rms, preferably, of 3 nm or less. According to this, a superhigh conductive thin film having high crystallinity, mobility and carrier concentration can be provided so as to contribute to making higher efficiency for a solar battery.
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