发明名称 SCANNING PROBE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a scanning probe microscope which can prevent frost from adhering to the surface of a sample. SOLUTION: When the surrounding is viewed out from the sample 9 in the state of the figure, only a cooling cover 27 which is cooled can be observed except the part of a cutout 28 for introducing cantilever. When a sample holder 10 is mounted on a cooling holder 7, most of water molecules which make rectilinear movement around the sample are trapped by the cooling cover 27. As a result, frost will not adhere to the surface of the sample unlike in the conventional cases, and the precise image on the surface of the sample can be observed by using a cantilever.
申请公布号 JP2002014026(A) 申请公布日期 2002.01.18
申请号 JP20000198223 申请日期 2000.06.30
申请人 JEOL LTD 发明人 NAKAMOTO KEIICHI
分类号 G01B21/30;G01Q30/08;G01Q30/10;G01Q30/20;(IPC1-7):G01N13/10 主分类号 G01B21/30
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