| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma-aided surface treatment method and treatment apparatus whereby a treatment area is enlarged and gas utilization efficiency is improved. SOLUTION: A gas is forced to flow through a flow path 24 provided in between electrodes 20, 22 facing each other, and discharge is started in between the electrodes 20, 22 for the activation of the gas in the flow path 24. The flow of the activated gas is split or enlarged for deceleration for the acceleration of the diffusion of the gas, and the gas with its diffusion accelerated is blown onto a workpiece 70. In the plasma-aided surface treatment apparatus 10, the flow path 24 and an opening 36 are connected, the flow of gas out of the flow path 24 is split or enlarged for deceleration, and a diffusion section 32 is provided for accelerating the diffusion of the gas. COPYRIGHT: (C)2005,JPO&NCIPI
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