ENRICHING METHOD OF AMMONIA AND DEVICE THEREFOR TO REMOVE MOISTURE, AND METAL AND GAS IMPURITIES FROM AMMONIA STREAM IN EFFECTIVE WAY

摘要

PURPOSE: An enriching method of ammonia and a device therefore are provided to remove moisture, and metal and gas impurities from an ammonia stream originated from a semiconductor manufacturing process, thereby collecting and recycling ammonia. CONSTITUTION: The enriching method of an ammonia stream having moisture and metal and gas impurities, comprises forming a crude liquid ammonia stream by condensing a crude ammonia stream with a condenser(22) and contacting the crude liquid ammonia stream with a distillation or a pervaporation membrane(29) in a distillation or a pervaporation module(26), provided that the enriched ammonia steam stream is removed as a permeate(30), wherein the crude ammonia stream is originated from a production device and recycled to the production device again.