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发明名称
Method for controlling atmosphere in annealing process of ZnO thin film
摘要
申请公布号
KR100726338(B1)
申请公布日期
2007.06.11
申请号
KR20050075492
申请日期
2005.08.18
申请人
发明人
分类号
H01L21/205;H01L21/324
主分类号
H01L21/205
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