发明名称 SIDE-DOCKING TYPE TEST HANDLER AND APPARATUS FOR TRANSFERRING TEST TRAY FOR THE SAME
摘要 <p>A side-docking type test handler and a test tray transferring apparatus for the same are provided to increase a processing speed of the test handler by performing a position conversion process of a vertical state in a soak chamber or a desoak chamber. A loading unit loads a non-tested semiconductor device stacked on a customer tray to a test tray of a loading position. A soak chamber(120) pre-heats and pre-cools the semiconductor device stacked on the test tray if the test tray of a horizontal state, which is completely loaded by the loading unit, is transferred. A test chamber(130) supports to test the non-tested semiconductor device stacked on the test tray transferred from the soak chamber. The desoak chamber controls a heating and a cooling of the semiconductor device stacked on the test tray transferred from the test chamber. An unloading unit(150) classifies the semiconductor device stacked on the test tray, which is transferred from the desoak chamber to an unloading position, by test levels, and unloads the semiconductor device to a vacant customer tray. A descending unit(220) descends the test tray of a horizontal state, which is transferred from the loading position to the inside of the soak chamber, to a descending completion position. A vertical position converter(230) converts a position into a vertical position to supply the test tray, which is descended to the descending completion position, to the test chamber. A horizontal position converter converts the test tray of a vertical state into a position of the horizontal state before transferring the test tray to the unloading position.</p>
申请公布号 KR100771475(B1) 申请公布日期 2007.10.30
申请号 KR20060097495 申请日期 2006.10.04
申请人 TECHWING CO., LTD. 发明人 SHIM, JAE GYUN;NA, YUN SUNG;JEON, IN GU;YO, DONG HYUN;KIM, BONG SOO;JOUNG, CHOUNG MIN
分类号 G01R31/26;H01L21/68 主分类号 G01R31/26
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