| 摘要 |
<P>PROBLEM TO BE SOLVED: To inexpensively provide a high-performance hydrogen-permeable composite membrane with excellent selective permeation and separation performance of hydrogen from a gas mixture, applicable to hydrogen refining and separation for a fuel cell, and allowing permeation of a large amount of hydrogen, and its manufacturing method. <P>SOLUTION: A mixed phase thin membrane consisting of a first metal phase comprising Cr, Ta, Nb, Mo, W, or an alloy containing two or more kinds selected from a group of Cr, Ta, Nb, Mo, W, and a second metal phase comprising Cu, Ag or an alloy containing Cu and Ag, is formed by a sputtering method, and the second metal phase in the obtained mixed phase thin membrane is removed by etching to form a thin membrane porous support body 2 with a membrane thickness of 1-10 μm. The hydrogen permeable membrane 1 with a membrane thickness of 0.5-5 μm is formed on the obtained thin membrane porous support body 2 by the sputtering method. <P>COPYRIGHT: (C)2008,JPO&INPIT |
