| 摘要 |
PROBLEM TO BE SOLVED: To surely pick up a part item from a dicing sheet and to efficiently feed the same to a specified step. SOLUTION: The specified position of a dicing sheet 2 is pushed up to raise its surface by a dicing sheet deforming means (push-up pin) 1, the part holding force of the dicing sheet 2 is lowered by reducing a contact area between a part item 3 (3a) and the dicing sheet 2, a chuck mechanism (vacuum suction chuck) 4 is moved roughly in a horizontal direction while its contact part 5 is in contact with the part item 3 (3a), and by applying a force to the part item 3 (3a) roughly in a horizontal direction, the part item 3 (3a) is peeled off from the dicing sheet 2, and the part item 3 (3a) is picked up by the vacuum suction chuck 4 and fed to a specified step. |
