发明名称 Simplified method of producing an epitaxially grown structure
摘要 Method to produce a structure consisting of depositing a material by columnar epitaxy on a crystalline face of a substrate (2), of continuing so that the columns (4) give a continuous layer (5). The surface is provided with a period array of bumps (3) on a nanometric scale, each bump (3) having a support zone (35) and being obtained from an array of crystalline defects and/or strain fields created within a crystalline region (16) located in the vicinity of a bonding interface (15) between two crystalline elements (11, 12) whose crystalline lattices have a twist and/or tilt angle and/or have interfacial lattice mismatch, able to condition the period (38) of the array of bumps (3). The period (38) of the array, the height (36) of the bumps and the size of their support zone (35) being adjusted so that the continuous layer (40) has a critical thickness that is greater than that obtained using epitaxy without the bumps.
申请公布号 US7579259(B2) 申请公布日期 2009.08.25
申请号 US20060158191 申请日期 2006.12.04
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 FOURNEL FRANK;MORICEAU HUBERT
分类号 H01L21/30;H01L21/46 主分类号 H01L21/30
代理机构 代理人
主权项
地址