| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical device advantageous for effectively performing deformation of a reflection surface of a mirror, and correction of a position and posture of the mirror.SOLUTION: An optical device for deforming a reflection surface of a mirror comprises: a base plate; a plurality of actuators that are arranged between the base plate and the mirror, and apply a force to a plurality of positions of the mirror; a detection part that detects an amount of deviation of a position and posture of the mirror from a reference state; and a control part that controls each of the plurality of actuators. The control part determines a shape difference between a shape of the reflection surface in the reference state and a target shape, and determines a composite amount of deviation by composing the amount of deviation detected by the detection part with the shape difference. The control part decides a command value for causing the plurality of actuators to generate the force to be applied to each of the plurality of positions of the mirror, based on information indicating an amount by which the reflection surface deforms when each of the actuators is driven in a unit amount and the composite amount of deviation.SELECTED DRAWING: Figure 1 |
