| 发明名称 |
Acoustic resonator having guard ring |
| 摘要 |
A bulk acoustic wave (BAW) resonator structure comprises a first electrode disposed over a substrate, a piezoelectric layer disposed over the first electrode, a second electrode disposed over the first piezoelectric layer, and a guard ring structure formed around a perimeter of an active region corresponding to an overlap of the first electrode, the first piezoelectric layer, and the second electrode. |
| 申请公布号 |
US9385684(B2) |
申请公布日期 |
2016.07.05 |
| 申请号 |
US201213658024 |
申请日期 |
2012.10.23 |
| 申请人 |
Avago Technologies General IP (Singapore) Pte. Ltd. |
发明人 |
Nikkel Phil;Feng Chris;Burak Dariusz;Choy John |
| 分类号 |
H03H9/02;H03H9/17 |
主分类号 |
H03H9/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A bulk acoustic wave (BAW) resonator structure, comprising:
a bottom electrode disposed over a substrate; a piezoelectric layer disposed over the bottom electrode; a top electrode disposed over the piezoelectric layer; a guard ring disposed around a perimeter of an active region corresponding to an overlap of the top electrode, the piezoelectric layer, and the bottom electrode; and a planarization layer disposed over the piezoelectric layer and between the top electrode and the guard ring. |
| 地址 |
Singapore SG |
