| 发明名称 | Micro-electromechanical system (MEMS) carrier | ||
| 摘要 | A micro-electromechanical system (MEMS) carrier formed by a typical surface micro-machining and bulk micro-machining process on a silicon substrate, having a frame, a movable carrier element, a conductive coil, two return springs and a pair of permanent magnets. The movable carrier element is formed within the frame and movable along a path, the conductive coil is formed on or embedded in the movable carrier element. The two return springs are formed between the movable carrier element and the frame thereby connecting the movable carrier element to the frame and providing a return force to the carrier element, and the pair of permanent magnets are formed a magnetic field for co-acting with the conductive coil for generating an electromagnetic Lorentz force to drive the movable carrier element to move against the return force of the two return springs. | ||
| 申请公布号 | US9417425(B2) | 申请公布日期 | 2016.08.16 |
| 申请号 | US201414341344 | 申请日期 | 2014.07.25 |
| 申请人 | GLOBALMEMS TAIWAN CORPORATION LIMITED | 发明人 | Lin Su-Jhen;Wu Ming-Ching |
| 分类号 | G02B7/02;H02K41/02;G02B7/08;G02B7/182;G02B26/08;H02K33/18;G02B7/18;G02B26/10;B81B3/00;H02K35/00 | 主分类号 | G02B7/02 |
| 代理机构 | Muncy, Geissler, Olds & Lowe, P.C. | 代理人 | Muncy, Geissler, Olds & Lowe, P.C. |
| 主权项 | 1. A micro-electromechanical system (MEMS) carrier, including: a frame; a movable carrier element, having first and second surfaces and formed within the frame and movable along a path; a conductive coil, formed on the movable carrier element; two return springs, formed between the movable carrier element and the frame thereby connecting the movable carrier element to the frame and providing a return force to the carrier element; and a pair of permanent magnets, forming a magnetic field for co-acting with the conductive coil for generating an electromagnetic Lorentz force to drive the movable carrier element to move against the return force of the two return springs. | ||
| 地址 | Chu-Pei TW | ||