发明名称 半導体装置
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device using a semiconductor chip having an interlayer insulation film of a low dielectric constant.SOLUTION: A resin layer including a glass fiber cloth is used for each of a core substrate 11 and insulation layers of first build-up substrates 12a, 12b and second build-up substrates 12c, 12d. A semiconductor chip 22 includes a semiconductor element formed on a silicon substrate, a SiOfilm formed on the semiconductor element, a wiring layer and an interlayer insulation film having a dielectric constant lower than that of the SiOfilm formed on the SiOfilm and a plurality of pad electrodes formed on the wiring layer and the interlayer insulation film. The plurality of pad electrodes are connected with the core substrate 11 via a plurality of first bump electrodes.
申请公布号 JP5974991(B2) 申请公布日期 2016.08.23
申请号 JP20130142696 申请日期 2013.07.08
申请人 ルネサスエレクトロニクス株式会社 发明人 林 英二;呉 強;原田 耕三;馬場 伸治
分类号 H01L23/12;H05K3/46 主分类号 H01L23/12
代理机构 代理人
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