| 摘要 |
PROBLEM TO BE SOLVED: To receive a process liquid in a sealed space by a cup part disposed at the exterior of a chamber.SOLUTION: A chamber lid part 122 is separated from a chamber side wall part 214 and an annular opening 81 is formed around a substrate 9. A cup part 161 includes: a side wall part 611; an upper surface part 612; and a lower surface part 613. The side wall part 611 faces the annular opening 81 in a radial direction. The upper surface part 612 contacts with a lip seal 232 of the chamber lid part 122 thereby forming a first seal 615 between the chamber lid part 122 and the cup part 161. The lower surface part 613 contacts with an outer seal part 169 of a chamber body 121 thereby forming a second seal 616 between the chamber body 121 and the cup part 161. A sealed space 160 is formed by the chamber 12 and the cup part 161. The structure allows a cup part 161 disposed at the exterior of the chamber 12 to receive a process liquid in the sealed space 160. |
