ENERGY CONFINEMENT TYPE PIEZOELECTRIC VIBRATOR

摘要

PROBLEM TO BE SOLVED: To provide the structure of the vibrator where the thickness of a diaphragm is locally made thick with high volume productivity while keeping high precision. SOLUTION: The energy confinement type piezoelectric vibrator comprises a ferroelectric thick film layer 2 that is formed to be a rectangle where thick film lamination of ferroelectric paste is sintered almost in the middle of one major side and a piezoelectric substrate 1, that has a plurality of drive electrodes formed extendedly at least on one major side so that a local part is laminated on the ferroelectric thick film layer 2 and that is polarized in a direction of thickness. The plurality of the drive electrodes consists of the electrode extended from one end of the piezoelectric substrate 1 including a 1st opposite face electrode 3 laminated to cover an upper part on the ferroelectric thick film layer 2 on one major side of the piezoelectric substrate 1 and of the electrode extended from the other end of the piezoelectric substrate 1 including a 2nd opposite face electrode 3 laminated in opposition to the 1st opposite face electrode 3 on the other major side of the piezoelectric substrate 1.