SHAPE MEASURING APPARATUS, PROCESSING APPARATUS, AND SHAPE MEASURING METHOD

摘要

The present invention relates to a shape measurement device capable of measuring a surface shape of a measurement object with high precision by reducing an influence of foreign materials existing on the surface. A shape measurement device which scans a measurement object by a detector in which three displacement meters are disposed in series, to measure a surface shape of the measurement, comprises: a gap calculation means which calculates gap data from difference between the measurement value based on the center displacement meter of the three displacement meters and the measurement values based on the other displacement meters; an interpolation means which calculates an average value and a standard deviation of the gap data, and repeatedly performs an interpolation process of interpolating a value out of the range set on the basis of the standard deviation in the gap data to the average value until a change rate of the standard deviation is equal to or less than a preset value; and a shape calculation means which calculates a surface shape of the measurement object on the basis of the interpolation-processed gap data.