WORKPIECE PROCESSING SYSTEM AND PROCESSING METHOD

摘要

A workpiece processing system and method to process a workpiece in processing chambers in order, in which even if processing duration varies at any chamber, such a variation does not affect the processing of the workpiece in other chambers. Each chamber performs processing of a workpiece in a predetermined order; a conveyor that conveys a workpiece to a next chamber; and a control device controls at least a start time of predetermined processing at each processing chamber. The control device sets: predetermined representative processing at a first chamber as a reference processing step, start time of the reference processing step as control start time, necessary processing duration specific to each chamber, necessary conveyance duration required to convey a workpiece between the chambers, and controls starting of the representative processing at each chamber while considering the control start time as origination.

主权项

1. A workpiece processing system comprising:
a plurality of processing chambers each of which performs processing of a workpiece in accordance with a predetermined order; a conveyor that conveys a workpiece subjected to processing at a predetermined processing chamber to a next processing chamber; and a control device that controls at least start time of predetermined representative processing among various types of processing performed at each processing chamber, wherein the control device sets predetermined representative processing at a first processing chamber that performs first processing as a reference processing step, sets start time of the reference processing step as control start time, sets necessary processing duration specific to each processing chamber, sets necessary conveyance duration required to convey a workpiece between the processing chambers, and controls starting of the representative processing at each processing chamber while considering the control start time as origination.