INSPECTION APPARATUS AND INSPECTION METHOD

摘要

In accordance with an embodiment, an inspection apparatus includes a detecting part and a control part. The detecting part detects a signal generated from a first layer including a wiring line or a contact due to application of an energy beam to the first layer. The control part sets an inspection area on the basis of a position of the wiring line or the contact that may be a defect in the first layer obtained by the signal and of information indicating an electric connection destination of the wiring line or the contact that may be the defect. The set inspection area includes a wiring line or a contact in a second layer different from the first layer. The second layer is electrically connected to the wiring line or the contact that may be the defect in the first layer.

主权项

1. An inspection apparatus comprising:
a detecting part configured to defect a signal generated from a first layer comprising a wiring line or a contact due to application of an energy beam to the first layer; and a control part configured to set an inspection area on the basis of a position of the wiring line or the contact that may be a defect in the first layer obtained by the signal and of information indicating an electric connection destination of the wiring line or the contact that may be the defect, the set inspection area comprising a wiring line or a contact in a second layer different from the first layer, the second layer being electrically connected to the wiring line or the contact that may be the defect in the first layer.