| 摘要 |
PURPOSE:To stabilize the glow discharge in a gas laser apparatus, by connecting an appropriate number of unit electrodes, namely a plurality of needle electrodes into a comb shape for constructing a cathode electrode and by covering the needle electrodes except the tips thereof with an insulating material. CONSTITUTION:A comb-shaped electrode 21a of a gas laser apparatus is connected to a ballast resistor 17 to constitute one unit cathode electrode. The comb-shaped electrode 21a is formed of a plurality of needle electrodes 23 connected with each other through a connector 29. Each needle electrode 23 is covered with an insulating material 25 except the tip 23a thereof. The tips 23a are connected with each other through a conducting small-gauge wire 27. The insulating material 25 prevents the glow discharge produced at the tip 23a from being spread excessively. When glow discharge is caused at one of the needle electrodes 23, the glow discharge is immediately transmitted to the next needle electrode. Accordingly, the difference in voltage among the needle electrodes 23 is substantially decreased and the gas laser apparatus as a whole performs extremely stable glow discharge. |
