发明名称 |
Semiconductor wafer furnace door |
摘要 |
A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a selfteaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.
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申请公布号 |
US4692115(A) |
申请公布日期 |
1987.09.08 |
申请号 |
US19860880422 |
申请日期 |
1986.06.30 |
申请人 |
THERMCO SYSTEMS, INC. |
发明人 |
ALDRIDGE, ROBERT E.;ELLOWAY, RUSSELL;FRITZ, WILLIAM O.;GOFF, RALPH D.;HERRERA, MICHAEL J. |
分类号 |
H01L21/00;H01L21/677;(IPC1-7):F27D1/18 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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