| 摘要 |
PURPOSE:To detect the occurrence of the defective machining by providing a pressure sensor to detect the pressure applied to an objected to be worked in the case of irradiating laser beam. CONSTITUTION:The pressure sensor 20 detects the pressure applied to the object to be worked 6 when the laser beam irradiates the object to be worked 6 and a detector 30 processes an output signal from the pressure sensor 20 and decides that the defective machining takes place and outputs a defective detected signal 31 when the output signal is lower than a predetermined set level. The defective machining can be prevented by said detected signal 31. |
