发明名称 Verfahren und Vorrichtung zum Ziehen eines Einkristalls
摘要 PCT No. PCT/JP97/03015 Sec. 371 Date Dec. 9, 1999 Sec. 102(e) Date Dec. 9, 1999 PCT Filed Aug. 29, 1997 PCT Pub. No. WO98/09007 PCT Pub. Date Mar. 5, 1998A method of pulling a single crystal includes forming an enlarged portion 26b and a reduced portion 26c under a neck 26a, and fitting the reduced portion for pulling an upsized single crystal. The reduced portion is formed with angle theta s so that the diameter can be measured at all times using an optical measuring means 19 with optical axis angle theta m, such that theta s> theta m.
申请公布号 DE19781967(T1) 申请公布日期 1999.09.09
申请号 DE1997181967T 申请日期 1997.08.29
申请人 SUMITOMO SITIX CORP. 发明人 FUJIWARA, HIDEKI
分类号 C30B15/26;C30B15/00;C30B15/22;C30B15/30 主分类号 C30B15/26
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