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发明名称
FILM-FORMING METHOD AND FILM-FORMING DEVICE
摘要
申请公布号
JPH1093160(A)
申请公布日期
1998.04.10
申请号
JP19960257656
申请日期
1996.09.06
申请人
APPLIED MATERIALS INC
发明人
TAOKA MEGUMI
分类号
C23C14/06;C23C14/34;H01L21/203;H01L21/285;H01L49/00;(IPC1-7):H01L49/00
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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