Ellipsometric microscope for two=dimensional ellipsometry and integrated point ellipsometry

摘要

The microscope has a construction that corresponds in its basic principle to the optical construction of a reflection or transmission microscope. However, the sample is illuminated over the entire visual field at a defined angle of incidence and with a defined polarization. The light reflected by the sample is evaluated to determine its intensity and its polarization. The microscope objective or the condenser may be illuminated with defined polarized light in its rear focal plane at only one point or one small speckle or on a ring concentric with the optical axis or a single point on this ring.