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发明名称
METHOD AND APPARATUS FOR CONTROLLING ION IMPLANTATION UNIT FOR AN EARLIER DETECTION OF ION IMPLANTATION ERROR
摘要
申请公布号
KR0161061(B1)
申请公布日期
1999.02.01
申请号
KR19940035587
申请日期
1994.12.21
申请人
NEC CORPORATION
发明人
SAITO, YOSHIYUKI
分类号
H01L21/265;C23C14/48;C23C14/54;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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