| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide cover opening/closing equipment for a substrate storing container, which can be easily controlled with a simple structure and requires a small installation space and a small power consumption, and equipment for carrying in/out the substrate to and from the substrate storing container. SOLUTION: An indexer 10 is provided with four stages 12 for placing a pod 1. A pad opener 30 for opening/closing the cover 2 of the pod 1 can be moved along the arrangement direction of the stages 12 by a Y-direction shifting mechanism 40. Consequently, the cover 2 can be opened/closed with only one pad opener 30 for the pod 1 placed on any stage of the four stages 12. As a result, the entire structure of the indexer 10 can be simplified, its control is facilitated, and the installation space and power consumption can be also reduced.</p> |
