| 摘要 |
PROBLEM TO BE SOLVED: To improve adhesion of an electrode and to stabilize the operation of the electrode by forming a metal oxide layer on a transparent substrate, forming irregularities on the surface by etching, and then electroless plating it to form a metal electrode. SOLUTION: A metal oxide such as zinc oxide or titanium oxide is applied to the whole surface of a transparent substrate 100 by means of spray thermal decomposition to form a metal oxide layer 110. The metal oxide layer 110 is patterned with a photoresist as a mask. The transparent substrate 100 having the metal oxide layer 110 formed thereon is exposed to an acidic solution such as palladium chloride, so that the surface of the metal oxide layer 110 is etched and catalyzed. The transparent substrate 100 having the metal oxide layer with the catalyzed surface formed thereon is exposed to an electroless plating solution consisting of copper sulfate solution, and the catalyzed metal oxide layer surface 110' is plated with a metal film to form a metal electrode 120. Further, it is electroless plated with chromium or the like as occasion demands to form a second electrode layer. |
