METHOD FOR EVALUATING SURFACE ACOUSTIC WAVE SONIC SPEED

摘要

PROBLEM TO BE SOLVED: To provide a method for speedily evaluating the surface acoustic wave sonic speed of a piezoelectric substrate to be measured with a simple device constitution without damaging the surface of the piezoelectric substrate to be measured. SOLUTION: A plurality of comb-shaped electrodes 3 are formed on a nonpiezoelectric and nonconductive substrate 1, whose surface is arranged opposite the surface of the measured piezoelectric substrate 2, and a nonconductive liquid 4 in interposed between the nonpiezoelectric and nonconductive substrate 1 and the piezoelectric substrate to be measured 2 and the nonpiezoelectric and nonconductive substrate 1 and the comb-shaped electrodes 3 formed thereupon, and the surface of the piezoelectric substrate 2 are positioned without in contact with each other. Then, the sonic speed of the surface acoustic wave for the piezoelectric substrate 2 is evaluated from electric characteristics of the comb-shaped electrodes 3.