| 摘要 |
PROBLEM TO BE SOLVED: To increase the temperature of a heater and prolong its life by separating the heater steadily from the furnace wall as well as selecting the more appropriate for the spacer for separating the heater, and by determining the distance limit so as to obtain a precise temperature control. SOLUTION: In installation of the bar heater mainly composed of MoSi2 on the furnace wall, a spacer made of an insulating material having high temperature oxidization resistance and thermal resistance is provided between the furnace wall insulation material and the heater exothermic portion, and the space between the furnace wall insulating material and the heater exothermic portion are separated.
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