发明名称 MANUFACTURING METHOD OF TUBE BALL
摘要 PROBLEM TO BE SOLVED: To curtail unevenness of film thickness of a coating formed on the surface of a glass bulb. SOLUTION: This manufacturing method includes a process for forming a coating film of a material gas chemically converted on the surface of a plurality of glass bulbs 1, by arranging them in a reaction tube 7 and passing the material gas, and a shielding member 23 is arranged between a supply port 8 for supplying the reaction tube 7 with the material gas, and the glass bulb nearest to the supply port 8.
申请公布号 JP2002015710(A) 申请公布日期 2002.01.18
申请号 JP20000194201 申请日期 2000.06.28
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KOJIMA TOSHIYASU
分类号 H01K3/00;(IPC1-7):H01K3/00 主分类号 H01K3/00
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