| 摘要 |
PROBLEM TO BE SOLVED: To realize a scanning electron microscope in which the actual magnification of a scan image and the length of an image on a display image plane can be correctly known. SOLUTION: For the scanning electron microscope designed so as to two- dimensionally scan an electron beam finely focused on a sample, detect a signal obtained from the sample, display a sample image in connection with the scanning of the electron beam based on the detected signal and also display the designated magnification according to the sizes of the two-dimensionally scanning region of the electron beam and the display region of the sample image, the scan image is displayed with specific magnification designated, and a standard sample is used to find an actual magnification so as to convert a value of the specific magnification into a value of the actual magnification or correct the length of a micron marker according to the actual magnification.
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