STRUCTURE OF OPTICAL SWITCH ON SUBSTRATE OF SILICON ON INSULATOR

摘要

PROBLEM TO BE SOLVED: To provide an optical switch using reflection MEMS mirrors. SOLUTION: An optical crossconnection system directs the incident light from a first optical fiber toward a second optical fiber by using a two-dimensional array of the MEMS tilting mirrors as a general concept. The respective MEMS tilting mirrors of the two-dimensional array tilt and rotate around two non-identical lines and are hung by plural suspension arms mounted to substrate of silicon on insulator.