NEXT PROCESS DETERMINING METHOD, INSPECTION METHOD AND INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To objectively determine in a short time the next process to be executed next. SOLUTION: A sample object is digitized into sample data composed of digital data (step 11). The sample data is compressed in accordance with a predetermined data format (step 12). A difference data volume is determined between a data volume of the compressed sample data and a data volume of reference data generated by digitizing and compressing a reference sample object in accordance with the same approach as in the sample object (step 13). It is specified to which of a plurality of predetermined numerical ranges the difference data volume belongs, and a predetermined process coordinated beforehand with the specified numerical range is determined as the next process to be executed next (steps 14-17).