| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable a reflecting means (a mirror) to be appropriately moved in a thin-film forming apparatus for manufacturing a long oxide superconductor. <P>SOLUTION: In a thin-film forming apparatus which makes a laser beam emitted from a laser oscillation device to reflect on at least one reflecting means and irradiate a target of a thin-film-forming material, a reflecting means 200 is moved to an appropriate direction by using a moving means 100, in order to appropriately change a reflecting position of the laser beam r. Then, the thin-film forming apparatus prevents the laser beam r from constantly and concentratedly reflecting on the same position of a reflecting surface, due to the moving means 100, and accordingly greatly reduces the deterioration of the reflecting surface with the lapse of time. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
