DREHBARER SUSZEPTOR UND VERFAHREN ZUM BEHANDELN VON SUBSTRATEN,申请号DE20026019323T-传众专利搜索

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发明名称	DREHBARER SUSZEPTOR UND VERFAHREN ZUM BEHANDELN VON SUBSTRATEN
摘要
申请公布号	DE60219323(T2)	申请公布日期	2007.08.30
申请号	DE20026019323T	申请日期	2002.07.09
申请人	MOORE EPITAXIAL INC.	发明人	NISHIKAWA, KATSUHITO
分类号	C23C16/458;C30B25/12	主分类号	C23C16/458
代理机构		代理人
主权项
地址

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