DIAMOND ELECTRON EMITTING ELEMENT, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electron emitting element using diamond having excellent characteristics as an electron emitting material which has an excellent electron emitting capacity in high output operation.

SOLUTION: The electron emitting element 1 has an electron emitting part 10 consisting of a projected diamond and a gate electrode 20 to impress electric field on the electron emitting part provided on an insulating layer 21. An electron supply part 11 to supply electrons is installed at the side on the surface of the projected electron emitting part 10, and at least the surface of the electron supply part is made of a material which is not etched by hydrofluoric acid. The electron supply part is made of at least two layers and the layer of the side near the electron emitting part is made of a layer with better adhesion with diamond, and the layer with better adhesion may be covered with a second electron supply part made of a material which is hardly etched by hydrofluoric acid.

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